Destroying semiconductor greenhouse gases

The making of semiconductors for devices such as flat panel displays produces a significant amount of perfluorinated gases.  Perfluorinated gases such as CF4, C2F6, NF3 are used for cleaning and etching in the semiconductor industry.  Because these are known greenhouse gases with equivalent greenhouse gas potencies that can be thousands of times stronger than that of CO2 preventing their release is important. United States Patent 7,892,506 teaches a burner that supplies the greenhouse gases through an annulus that has foraminous/pourous surfaces through which combustion gases are supplied. The patent consistently teaches that the combustion occurs at the exit surfaces of the burner. The burner is displayed below.

Seeley burner

Seeley burner

Andrew James Seeley of Bristol Great Britain is the inventor and the invention was assigned to Edwards Limited of Crawley, West Sussex, GB.